American startup Substrate promises 2nm-class chipmaking with particle accelerators, at a tenth of the cost of EUV — X-ray lithography system has potential to surpass ASML's EUV scanners

https://www.tomshardware.com/tech-industry/semiconductors/american-startup-substrate-promises-2nm-class-chipmaking-with-particle-accelerators-at-a-tenth-of-the-cost-of-euv-x-ray-lithography-system-has-potential-to-surpass-asmls-euv-scanners